CN104718432A - Method of correcting detection position of electromagnetic inductance-type position detector - Google Patents

Method of correcting detection position of electromagnetic inductance-type position detector Download PDF

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CN104718432A
CN104718432A CN201380051299.7A CN201380051299A CN104718432A CN 104718432 A CN104718432 A CN 104718432A CN 201380051299 A CN201380051299 A CN 201380051299A CN 104718432 A CN104718432 A CN 104718432A
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coil
span
certain speed
detection
moving section
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CN104718432B (en
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竹内克佳
石井浩
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Mitsubishi Heavy Industries Ltd
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Mitsubishi Heavy Industries Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24476—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24495—Error correction using previous values

Abstract

The purpose of the present invention is to provide a method for correcting the detection position of an electromagnetic inductance-type position detector allowing for correction of detection positions without requiring a high precision position detector separate from the electromagnetic inductance-type position detectors, the correction data therefor being acquired by the electromagnetic inductance-type position detector itself. This is accomplished by performing: a detection position acquiring process of acquiring a detection position by moving a moving body according to a velocity command value for a constant velocity and detecting the position of the moving body with the electromagnetic inductance-type position detector; a constant velocity determining process of determining that the moving body has moved at the constant velocity in a prescribed movement section on the basis of, for example, the detection position and coil pitch; and a correction data acquiring process of acquiring correction data on the basis of an approximated ideal position and the detection position, wherein the approximated ideal position is found by adding the product of the constant velocity and the elapsed time since acquisition of a reference detection position to the reference detection position, where the reference detection position is the detection position corresponding to the starting position of any of the coil pitches in the movement section.

Description

The detection method for correcting position of induction position detector
Technical field
The present invention relates to the detection method for correcting position of the induction position detector of line style rule or rotary-type rule.
Background technology
The position that the rule of induction position detector and inductosyn mode is applicable in the various machineries such as lathe, automobile, robot is detected.There is line style rule and rotary-type rule in the rule of inductosyn mode.Line style rule is located at the moving bodys such as the worktable of lathe and detects the shift position of the straight line of this moving body, and rotary-type rule is located at the moving bodys such as the rotary table of lathe (rotary body) and detects the position of rotation (anglec of rotation) of this moving body (rotary body).
Line style rule and rotary-type rule are all that the electromagnetic induction of coil pattern by configuring in opposite directions in parallel to each other detects position.Schematic diagram based on Fig. 6 illustrates this Cleaning Principle.
Fig. 6 (a) is the stereographic map representing the state that the slide rule of line style rule and rule are configured in parallel to each other in opposite directions, above-mentioned slide rule and above-mentioned rule are arranged the figure represented by Fig. 6 (b), and Fig. 6 (c) is the figure of the electromagnetic coupled degree representing above-mentioned slide rule and above-mentioned rule.
In addition, the Cleaning Principle of rotary-type rule is also same with line style rule, and the stators and rotators of rotary-type rule corresponds to slide rule and the rule of line style rule.Line style rule and rotary-type rule all have test section and detection control apparatus.
As shown in Fig. 6 (a) and Fig. 6 (b), the test section 10 of line style rule has the slide rule 1 as primary side parts and the rule 2 as secondary side parts.
Slide rule 1 is movable part, has the 1st slide rule coil 3 as the 1st first siding ring and the 2nd slide rule coil 4 as the 2nd first siding ring.Rule 2 is fixed part, has the rule coil 5 as second siding ring.Coil 3,4,5 indentation ground turn back (becoming comb pattern), the mode becoming linearity with entirety is formed.Slide rule 1 be installed on the moving bodys such as the worktable of lathe and together with this moving body rectilinearity mobile.Rule 2 is fixed on the fixed parts such as the lathe bed of lathe.
As shown in Fig. 6 (a), slide rule 1 (the 1st slide rule coil 3 and the 2nd slide rule coil 4) and rule 2 (rule coil 5) with the state maintaining predetermined gap g between which in parallel to each other mode in opposite directions configure.And as shown in Fig. 6 (a) and Fig. 6 (b), the 1st slide rule coil 3 and the 2nd slide rule coil 4 stagger 1/4 spacing.
In the line style rule of said structure, when exciting current (alternating current) flows in the 1st slide rule coil 3 and the 2nd slide rule coil 4, correspond to the change of the relative position relation of the 1st slide rule coil 3 and the 2nd slide rule coil 4 and the rule coil 5 accompanied with the movement of slide rule 1, as shown in Fig. 6 (c), the 1st slide rule coil 3 and the 2nd slide rule coil 4 periodically change with the electromagnetic coupled degree of rule coil 5.Therefore, the induced voltage periodically changed is produced at rule coil 5.
Specifically, in the detection control apparatus of line style rule, such the 1st exciting current Ia of following (1) formula flows in the 1st slide rule coil 3, and such the 2nd exciting current Ib of following (2) formula flows in the 2nd slide rule coil 4.
Ia＝-Icos(kα)sin(ωt) (1)
Ib＝Isin(kα)sin(ωt) (2)
Wherein, I: the size of exciting current
k：2π/p
P: coil-span (length: be angle in rotary-type rule)
ω: the angular frequency of exciting current (alternating current)
T: time
α: vibrator position
Consequently, due to the 1st slide rule coil 3 and the electromagnetic induction effect between the 2nd slide rule coil 4 and rule coil 5, produce the such induced voltage V of following (3) formula at rule coil 5.
V＝KIsin(k(X-α))sin(ωt) (3)
Wherein, K: the transfer coefficient depending on the angular frequency of gap g and exciting current
X: detect position (shift position of moving body)
In above-mentioned detection control apparatus, the induced voltage V of input rule coil 5, calculate the value that this induced voltage V is the vibrator position alpha (namely becoming the vibrator position alpha of X=α) of 0, and this vibrator position alpha exported as the detection position X of moving body (slide rule 1), and adjust the 1st exciting current Ia and the 2nd exciting current Ib based on this vibrator position alpha.That is, make vibrator position alpha follow the position X of moving body (slide rule 1) in the mode becoming X=α, and control in the mode becoming induced voltage V=0, detect the position X of moving body (slide rule 1) thus and export.
Patent documentation 1: Japanese Unexamined Patent Publication 2000-180107 publication
Summary of the invention
But the induction position detector (line style rule, rotary-type rule) of reality exists foozle, assembly error, and therefore above-mentioned (3) formula is false, detect position X and be attended by error.Detect the error of position X usually used as being contained in, what obviously occur is the error (error periodically changed corresponding to the cycle of coil-span) in coil-span cycle, is referred to as interpolated error.
As the method corrected detection position X, can consider to use the high precision position detecting device different from induction position detector, obtain the method for correction data based on the detection position of this high precision position detecting device and the detection position X of induction position detector.But in the method, must prepare high precision position detecting device, therefore cost raises, also spended time and labour.
Therefore, the present invention makes in view of the above circumstances, and problem is that providing a kind of does not need the high precision position detecting device different from induction position detector and can obtain correction data by induction position detector self and carry out the detection method for correcting position of the induction position detector of the correction detecting position.
Solve in the detection method for correcting position of the induction position detector of the 1st invention of above-mentioned problem, above-mentioned induction position detector has primary side parts and secondary side parts, above-mentioned primary side parts possess first siding ring, above-mentioned secondary side parts possess second siding ring, above-mentioned primary side parts or above-mentioned secondary side parts are installed on moving body and move together with above-mentioned moving body, above-mentioned first siding ring and above-mentioned second siding ring are to be parallel to each other and mode in opposite directions configures, the feature of the detection method for correcting position of above-mentioned induction position detector is, carry out following process: detect position obtaining portion reason, according to the speed value of certain speed, above-mentioned moving body is moved, above-mentioned induction position detector is utilized to detect the position of above-mentioned moving body and obtain detection position, certain speed judges process, based on the coil-span of above-mentioned detection position and above-mentioned second siding ring, or based on the traveling time of above-mentioned detection position, above-mentioned certain speed and above-mentioned moving body, or based on the traveling time of the coil-span of above-mentioned second siding ring, above-mentioned certain speed and above-mentioned moving body, judge that above-mentioned moving body has carried out this situation mobile with above-mentioned certain speed in predetermined moving section, and correction data obtains process, detecting position corresponding to the position, top of the arbitrary coil-span in above-mentioned moving section is installed as Reference detection positions, the multiplied value from obtaining said reference and detect elapsed time position and above-mentioned certain speed is added to above-mentioned Reference detection positions, obtain approximate ideal position thus, obtain correction data based on this approximate ideal position and detection position.
In addition, the detection method for correcting position of the induction position detector of the 2nd invention is based on the detection method for correcting position of the induction position detector of the 1st invention, it is characterized in that, judge in process at above-mentioned certain speed, above-mentioned moving section is set to the n interval being doubly equivalent to above-mentioned coil-span p, n is natural number, and the traveling time needed for above-mentioned moving body is mobile in above-mentioned moving section with above-mentioned certain speed S is set to T 1, the detecting position corresponding to the position, top of above-mentioned moving section is installed as X (t 0), the detecting position corresponding to the terminal position of above-mentioned moving section is installed as X (t 0+ T 1), threshold value is set to ± L, is then meeting n*p-L>=X (t 0+ T 1)-X (t 0during the condition of)>=n*p+L, be judged as that above-mentioned moving body moves with above-mentioned certain speed S in above-mentioned moving section.
In addition, the detection method for correcting position of the induction position detector of the 3rd invention is based on the detection method for correcting position of the induction position detector of the 1st invention, it is characterized in that, judge in process at above-mentioned certain speed, above-mentioned moving section is set to the n interval being doubly equivalent to above-mentioned coil-span p, n is natural number, and the traveling time needed for above-mentioned moving body is mobile in above-mentioned moving section with above-mentioned certain speed S is set to T 1, the detecting position corresponding to the position, top of above-mentioned moving section is installed as X (t 0), the detecting position corresponding to the terminal position of above-mentioned moving section is installed as X (t 0+ T 1), threshold value is set to ± L, is then meeting S*T 1-L>=X (t 0+ T 1)-X (t 0)>=S*T 1during the condition of+L, be judged as that above-mentioned moving body moves with above-mentioned certain speed S in above-mentioned moving section.
In addition, the detection method for correcting position of the induction position detector of the 4th invention is based on the detection method for correcting position of the induction position detector of the 1st invention, it is characterized in that, judge in process at above-mentioned certain speed, above-mentioned moving section is set to the n interval being doubly equivalent to above-mentioned coil-span p, n is natural number, will be judged as that the traveling time of above-mentioned moving body in above-mentioned moving section required for movement is set to T 2, threshold value is set to ± L, is then meeting n*p-L>=S*T 2during the condition of>=n*p+L, be judged as that above-mentioned moving body moves with above-mentioned certain speed S in above-mentioned moving section.
In addition, based on the detection method for correcting position of the arbitrary induction position detector of detection method for correcting position in the 1st ~ 4th invention of the induction position detector of the 5th invention, it is characterized in that, obtain in process at above-mentioned correction data, time during detection position corresponding to the position, top of the arbitrary coil-span p achieved in above-mentioned moving section is set to t 0, time during detection position corresponding to the terminal position of the another arbitrary coil-span p achieved in above-mentioned moving section is set to t 0+ T, installs the detecting position corresponding to the position, top of the arbitrary coil-span p in above-mentioned moving section as Reference detection positions X (t 0), said reference will be obtained and detect position X (t 0) after to be set to t (m)=0 ~ T, m be index number elapsed time t (m), Δ t fixed and set up the corresponding relation of index number m and t (m), or Δ x fixed and sets up index number m and X (t 0+ t (m)) corresponding relation, by E (m)=X (t 0)+S*t (m)-X (t 0+ t (m)) formula calculate correction data E (m) corresponding with index number m.
In addition, based on the detection method for correcting position of the arbitrary induction position detector of detection method for correcting position in the 1st ~ 5th invention of the induction position detector of the 6th invention, it is characterized in that, above-mentioned moving section is set to multiple, obtain correction data at this multiple moving section, the mean value of this multiple correction data is set to final correction data.
In addition, based on the detection method for correcting position of the arbitrary induction position detector of detection method for correcting position in the 1st ~ 6th invention of the induction position detector of the 7th invention, it is characterized in that, Fourier transform is carried out to above-mentioned correction data, component F (i) large for the spectrum of upper several j amount is stored in storer, wherein i=0 ~ j-1, reads component F (i) from above-mentioned storer, carries out inverse Fourier transform and obtain correction data.
Invention effect
According to the detection method for correcting position of the induction position detector of the 1st invention, above-mentioned induction position detector has primary side parts and secondary side parts, above-mentioned primary side parts possess first siding ring, above-mentioned secondary side parts possess second siding ring, above-mentioned primary side parts or above-mentioned secondary side parts are installed on moving body and move together with above-mentioned moving body, above-mentioned first siding ring and above-mentioned second siding ring are to be parallel to each other and mode in opposite directions configures, the feature of the detection method for correcting position of above-mentioned induction position detector is, carry out following process: detect position obtaining portion reason, according to the speed value of certain speed, above-mentioned moving body is moved, above-mentioned induction position detector is utilized to detect the position of above-mentioned moving body and obtain detection position, certain speed judges process, based on the coil-span of above-mentioned detection position and above-mentioned second siding ring, or based on the traveling time of above-mentioned detection position, above-mentioned certain speed and above-mentioned moving body, or based on the traveling time of the coil-span of above-mentioned second siding ring, above-mentioned certain speed and above-mentioned moving body, judge that above-mentioned moving body has carried out this situation mobile with above-mentioned certain speed in predetermined moving section, and correction data obtains process, detecting position corresponding to the position, top of the arbitrary coil-span in above-mentioned moving section is installed as Reference detection positions, the multiplied value from obtaining said reference and detect elapsed time position and above-mentioned certain speed is added to above-mentioned Reference detection positions, obtain approximate ideal position thus, correction data is obtained based on this approximate ideal position and detection position, therefore, do not need the high precision position detecting device different from induction position detector, self can obtain correction data by induction position detector and carry out detecting the correction of position.
According to the detection method for correcting position of the induction position detector of the 2nd invention, based on the detection method for correcting position of the induction position detector of the 1st invention, it is characterized in that, judge in process at above-mentioned certain speed, above-mentioned moving section is set to the n interval being doubly equivalent to above-mentioned coil-span p, n is natural number, and the traveling time needed for above-mentioned moving body is mobile in above-mentioned moving section with above-mentioned certain speed S is set to T 1, the detecting position corresponding to the position, top of above-mentioned moving section is installed as X (t 0), the detecting position corresponding to the terminal position of above-mentioned moving section is installed as X (t 0+ T 1), threshold value is set to ± L, is then meeting n*p-L>=X (t 0+ T 1)-X (t 0during the condition of)>=n*p+L, be judged as that above-mentioned moving body moves with above-mentioned certain speed S in above-mentioned moving section, therefore, can easily and reliably carry out the judgement of the certain speed of moving body by induction position detector self.
According to the detection method for correcting position of the induction position detector of the 3rd invention, based on the detection method for correcting position of the induction position detector of the 1st invention, it is characterized in that, judge in process at above-mentioned certain speed, above-mentioned moving section is set to the n interval being doubly equivalent to above-mentioned coil-span p, n is natural number, and the traveling time needed for above-mentioned moving body is mobile in above-mentioned moving section with above-mentioned certain speed S is set to T 1, the detecting position corresponding to the position, top of above-mentioned moving section is installed as X (t 0), the detecting position corresponding to the terminal position of above-mentioned moving section is installed as X (t 0+ T 1), threshold value is set to ± L, is then meeting S*T 1-L>=X (t 0+ T 1)-X (t 0)>=S*T 1during the condition of+L, be judged as that above-mentioned moving body moves with above-mentioned certain speed S in above-mentioned moving section, therefore, can easily and reliably carry out the judgement of the certain speed of moving body by induction position detector self.
According to the detection method for correcting position of the induction position detector of the 4th invention, based on the detection method for correcting position of the induction position detector of the 1st invention, it is characterized in that, judge in process at above-mentioned certain speed, above-mentioned moving section is set to the n interval being doubly equivalent to above-mentioned coil-span p, n is natural number, will be judged as that the traveling time of above-mentioned moving body in above-mentioned moving section required for movement is set to T 2, threshold value is set to ± L, is then meeting n*p-L>=S*T 2during the condition of>=n*p+L, be judged as that above-mentioned moving body moves with above-mentioned certain speed S in above-mentioned moving section, therefore, can easily and reliably carry out the judgement of the certain speed of moving body by induction position detector self.
According to the detection method for correcting position of the induction position detector of the 5th invention, based on the detection method for correcting position of the arbitrary induction position detector in the 1st ~ 4th invention, it is characterized in that, obtain in process at above-mentioned correction data, time during detection position corresponding to the position, top of the arbitrary coil-span p achieved in above-mentioned moving section is set to t 0, time during detection position corresponding to the terminal position of the another arbitrary coil-span p achieved in above-mentioned moving section is set to t 0+ T, installs the detecting position corresponding to the position, top of the arbitrary coil-span p in above-mentioned moving section as Reference detection positions X (t 0), said reference will be obtained and detect position X (t 0) after to be set to t (m)=0 ~ T, m be index number elapsed time t (m), Δ t fixed and set up the corresponding relation of index number m and t (m), or Δ x fixed and sets up index number m and X (t 0+ t (m)) corresponding relation, by E (m)=X (t 0)+S*t (m)-X (t 0+ t (m)) formula calculate correction data E (m) corresponding with index number m, therefore, can easily and reliably obtain correction data E (m) by induction position detector self.
According to the detection method for correcting position of the induction position detector of the 6th invention, based on the detection method for correcting position of the arbitrary induction position detector in the 1st ~ 5th invention, it is characterized in that, be multiple by above-mentioned moving section, correction data is obtained at this multiple moving section, the mean value of this multiple correction data is set to final correction data, therefore, it is possible to obtain more high-precision correction data.
According to the detection method for correcting position of the induction position detector of the 7th invention, based on the detection method for correcting position of the arbitrary induction position detector in the 1st ~ 6th invention, it is characterized in that, Fourier transform is carried out to above-mentioned correction data, component F (i) large for the spectrum of upper several j amount (i=0 ~ j-1) is stored in storer, component F (i) is read from above-mentioned storer, carry out inverse Fourier transform and obtain correction data, therefore, it is possible to reduce the capacity of storer.
Accompanying drawing explanation
Fig. 1 is the figure of the structure of the system of the detection method for correcting position representing the induction position detector implementing embodiments of the present invention example 1.
Fig. 2 is the process flow diagram of the processing order representing above-mentioned detection method for correcting position.
Fig. 3 (a) represents to comprise the rheological parameters' change with time of detection position of error and the coordinate diagram of the rheological parameters' change with time of ideal position, and Fig. 3 (b) is the coordinate diagram representing the rheological parameters' change with time being contained in the error detecting position.
Fig. 4 (a) is the table of the corresponding relation represented when being fixed by Δ t and establish the corresponding relation of index number m and t (m), and Fig. 4 (b) represents fixed by Δ x and establish index number m and X (t 0+ t (m)) corresponding relation time the table of corresponding relation.
Fig. 5 is the coordinate diagram of the change representing correction data E (m).
Fig. 6 (a) is the stereographic map representing the slide rule that makes line style rule and rule state in opposite directions in parallel to each other, Fig. 6 (b) is the figure above-mentioned slide rule and the arrangement of above-mentioned rule represented, Fig. 6 (c) is the figure of the electromagnetic coupled degree representing above-mentioned slide rule and above-mentioned rule.
Embodiment
Below, based on accompanying drawing, describe embodiments of the present invention example in detail.
< embodiment example 1>
Based on Fig. 1 ~ Fig. 4, the detection method for correcting position of the induction position detector of embodiments of the present invention example 1 is described.
First, based on Fig. 1, the structure of the system of the detection method for correcting position of the induction position detector implementing present embodiment example 1 is described.
System shown in Fig. 1 becomes the structure with induction position detector 11, driving control device 20, moving body 21.Moving body 21 is such as the moving body of such rectilinear movement such as worktable of lathe.Driving control device 20 possess moving body 21 is moved linearly feed mechanism portion (such as possessing the feed mechanism such as motor, ball-screw portion), control this feed mechanism portion to the drive control part etc. of the driving of moving body 21.
Induction position detector 11 has test section 17, detection control apparatus 18.
In addition, at this, illustrate that induction position detector 11 is the situation of line style rule, but the present invention also goes for the situation that induction position detector 11 is rotary-type rule.
Detection control apparatus 18 has detection control portion 18A and read-only storage 18B.Detection control portion 18A carries out the process etc. of exciting current to the detection signal (induced voltage) of the supply of test section 17, test section 17.Even if read-only storage 18B stops powering to read-only storage 18B also keeping the storer (RAM, ROM) of the type storing data.
About the structure of the test section 17 of induction position detector 11 (line style rule), the elemental motion of detection control apparatus 18 (detection control portion 18A), as in the past.
Specifically, test section 17 has the slide rule 12 as primary side parts and the rule 15 as secondary side parts.
Slide rule 12 is movable part, has the 1st slide rule coil 13 as the 1st first siding ring and the 2nd slide rule coil 14 as the 2nd first siding ring.Rule 15 is fixed parts, has the rule coil 16 as second siding ring.Coil 13,14,16 indentation ground turn back (becoming comb pattern), the mode becoming linearity with entirety is formed.Slide rule 12 is installed on moving body 21 and moves linearly together with moving body 12.Rule 12 is fixed on the fixed parts such as the lathe bed of such as lathe.
Slide rule 12 (the 1st slide rule coil 13 and the 2nd slide rule coil 14), rule 15 (rule coil 16) configure (with reference to Fig. 6 (a)) in parallel to each other in opposite directions with the state maintaining predetermined gap g between which.And the 1st slide rule coil 13 and the 2nd slide rule coil 14 stagger 1/4 spacing.
In the induction position detector 11 of said structure, when exciting current (alternating current) flows in the 1st slide rule coil 13 and the 2nd slide rule coil 14, correspond to the change of the relative position relation of the 1st slide rule coil 13 and the 2nd slide rule coil 14 and the rule coil 16 accompanied with the movement of slide rule 12, the 1st slide rule coil 13 and the 2nd slide rule coil 14 periodically change (with reference to Fig. 6 (c)) with the electromagnetic coupled degree of rule coil 16.Therefore, rule coil 16 produces the induced voltage periodically changed.
Specifically, in detection control portion 18A, such the 1st exciting current Ia of following (11) formula flows in the 1st slide rule coil 13, and such the 2nd exciting current Ib of following (12) formula flows in the 2nd slide rule coil 14.
Ia＝-Icos(kα)sin(ωt) (11)
Ib＝Isin(kα)sin(ωt) (12)
Wherein, I: the size of exciting current
k：2π/p
P: coil-span (length: be angle in rotary-type rule)
ω: the angular frequency of exciting current (alternating current)
T: time
α: vibrator position
Consequently, due to the 1st slide rule coil 13 and the electromagnetic induction effect between the 2nd slide rule coil 14 and rule coil 16, produce the such induced voltage V of following (3) formula at rule coil 16.
V＝KIsin(k(X-α))sin(ωt) (13)
Wherein, K: the transfer coefficient depending on the angular frequency of gap g and exciting current
X: detect position (shift position of moving body)
In detection control portion 18A, the induced voltage V of input rule coil 16, calculate the value that this induced voltage V is the vibrator position alpha (namely becoming the vibrator position alpha of X=α) of 0, this vibrator position alpha is exported as the detection position X of moving body 21 (slide rule 12), and adjusts the 1st exciting current Ia and the 2nd exciting current Ib based on this vibrator position alpha.That is, make vibrator position alpha follow the position X of moving body 21 (slide rule 12) in the mode becoming X=α, and control in the mode becoming induced voltage V=0, detect the position X of moving body 21 (slide rule 12) thus and export.
But as previously described, the induction position detector 11 of reality existed foozle, assembly error, and therefore above-mentioned (13) formula is false, detected position X and be attended by error E.As this error E, significantly performance is the error (interpolated error) in coil-span cycle.
Therefore, in order to carry out the detection of high-precision position, needing to obtain correction data and carrying out correct detection position X.
Below, the bearing calibration of this detection position X is described.First, based on the process flow diagram of Fig. 2, the summary of each process of the detection method for correcting position implemented by detection control apparatus 18 (detection control portion 18A, read-only storage 18B) is described, then, based on Fig. 1 ~ Fig. 4, describe each process of above-mentioned detection method for correcting position in detail.
As shown in Figure 2, first, detection position obtaining portion reason is carried out in step sl.
In this detection position obtaining portion reason, make moving body 21 (slide rule 12) mobile according to the speed value of certain speed S, the position being detected moving body 21 (slide rule 12) by induction position detector 11 obtains detection position X.This detection position X as the time t of moving body 21 (slide rule 12) movement function and can X (t) be expressed as.
Then, in step s 2, carry out certain speed and judge process.
When making moving body 21 (slide rule 12) mobile according to the speed value of certain speed S, moving body 21 (slide rule 12) is after accelerating to and becoming certain speed S, move near target location with certain speed S, then, carry out slowing down and stopping at target location.Further, detection position X (t) obtained when needing use moving body 21 (slide rule 12) reality to move with certain speed S of correction data.
Therefore, judge in process at certain speed, based on the coil-span p (the 1st certain speed determination methods) detecting position X (t) and second siding ring 16, or based on detection position X (t), certain speed S, the traveling time (the 2nd certain speed determination methods) of moving body 21 (slide rule 12), or based on the coil-span p of second siding ring 16, certain speed S, the traveling time (the 3rd certain speed determination methods) of moving body 21 (slide rule 12), judge that moving body 21 has carried out this situation mobile with certain speed S in predetermined moving section.
Judge that the result of process is (no) when cannot be judged as that due to certain unfavorable condition moving body 21 (slide rule 12) has carried out moving with certain speed S in above-mentioned moving section in the certain speed of step S2, after this unfavorable condition is eliminated, the certain speed of the detection position obtaining portion reason and step S2 that again perform step S1 judges process.
On the other hand, judge that the result of process is (YES) when being judged as that moving body 21 has carried out moving with certain speed S in above-mentioned moving section in the certain speed of step S2, in next step S3, carry out correction data obtain process.
Obtain in process at this correction data, using the detection position corresponding with the position, top of arbitrary coil-span p in above-mentioned moving section as Reference detection positions, the multiplied value obtaining elapsed time that this Reference detection positions rises and certain speed S is added to Reference detection positions, obtain approximate ideal position (position close to ideal position) thus, and obtain correction data based on this approximate ideal position and detection position.
In step s 4 which, the correction data obtained is stored in read-only storage 18B.
Then, illustrate that each process, i.e. the detection position obtaining portion detecting method for correcting position is managed, certain speed judgement processes, correction data obtains process.
(1) position obtaining portion reason is detected
Detect position X (t) to obtain, moving body 21 (slide rule 12) is moved with certain speed S.
Specifically, certain speed S as speed value and target location is given to driving control device 20.Driving control device 20 is based on the speed value of certain speed S and target location, control the driving of feed mechanism portion to moving body 21 (slide rule 12), moving body 21 (slide rule 12) is made to start thus and after accelerating to certain speed S, move near target location with certain speed S, then, carry out slowing down and stopping at target location.
Now in the detection control portion 18A of detection control apparatus 18, obtain and detect position X (t).
Now, position X (t) is detected with error E.
In Fig. 3 (a), transverse axis is time t, the longitudinal axis is X (t), Xi (t), Fig. 3 (a) expression comprises the rheological parameters' change with time of detection position X (t) of error E and the rheological parameters' change with time of ideal position (real position) Xi (t).
In Fig. 3 (b), transverse axis is time t, and the longitudinal axis is error E, and the rheological parameters' change with time of error E and the coil pattern of rule coil 16 that are contained in detection position X (t) illustrate by Fig. 3 (b) accordingly.
As mentioned before, what significantly occur as error E is the error (interpolated error) in coil-span cycle, and therefore error E periodically changes corresponding to the coil-span cycle of rule coil 16 like that as Fig. 3 (b) illustrates.Therefore, detection position X (t) comprising error E also corresponds to the coil-span cycle of rule coil 16 and periodically changes as illustrated in Fig. 3 (a).In addition, periodically changing this situation to clearly represent corresponding to the coil-span cycle, in figure 3, represent error E with sine wave, but the error E of reality becoming the waveform be slightly out of shape.
In addition, in the following description, the position, top of coil-span p refers to starting position (starting point) p of each coil-span p of the rule coil 16 shown in Fig. 3 (b) s, the terminal position of coil-span p refers to end position (terminal) p of each coil-span p of the rule coil 16 shown in Fig. 3 (b) e.In addition, position, top and terminal position are all the boundaries (joint eye) of adjacent coil-span p.
(2) certain speed judges process
Use detection position X (t) obtained by detection position obtaining portion reason, carry out certain speed and judge process.
This certain speed judges that process is undertaken by the 1st certain speed determination methods shown below or the 2nd certain speed determination methods or the 3rd certain speed determination methods.
(a) the 1st certain speed determination methods
By time t 0detection position X (t) be set to X (t 0).
By time t 0+ T 1detection position X (t) be set to X (t 0+ T 1).
Traveling time needed for moving body 21 (slide rule 12) is mobile in the predetermined moving section of n times (n is for the natural number) of coil-span p with certain speed S is set to T 1.In addition, at this, the example (Fig. 1) of line style rule is shown as induction position detector 11, and therefore amount of movement is displacement (becoming the anglec of rotation when rotary-type rule).
Traveling time T 1be the certain hour preset, decided by certain speed S, coil-span p, coil-span number n, can be calculated by the formula of n*p/S.In addition, * represent the mark of multiplying × (other record position too, in claims and accompanying drawing too).
Coil-span p is such as 2mm (being such as 2 degree at rotary-type rule) when line style rule.
Coil-span number n is set to such as 256 spacing.
Above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) is set as the interval the 356th (when coil-span number n is 256) coil-span p such as from the 101st coil-span p of rule coil 16 to rule coil 16.
Detect position X (t 0) be the detection position corresponding to position, top of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p).And the position, top of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) is equivalent to the position, top of the coil-span p of initial (the 1st) of this moving section.
Detect position X (t 0+ T 1) be the detection position corresponding to terminal position of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p).And the terminal position of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) is equivalent to the terminal position of the coil-span p of last (the n-th: such as the 256th) of this moving section.
In addition, although preferably so setting, but be not defined in this, also can be, the position, top of above-mentioned predetermined moving section (being equivalent to the n interval doubly of this coil-span p) is the half-way (position between the position, top of this coil-span p and terminal position) of the coil-span p of initial (the 1st) of this moving section, the terminal position of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) is the half-way (position between the position, top of this coil-span p and terminal position) of the coil-span p of last (the n-th: such as the 256th) of this moving section.
Namely, judging that moving body 21 (slide rule 12) is not limited to the interval of position, top to the terminal position of the coil-span p of last (the n-th: such as the 256th) from the coil-span p of initial (the 1st) with the predetermined moving section (being equivalent to the n interval doubly of coil-span p) that certain speed S has carried out this situation mobile, also can be the interval the half-way from the half-way of the coil-span p of initial (the 1st) to the last coil-span p of (the n-th: such as the 256th).
The detection position X (t obtained 0) and detect position X (t 0+ T 1) comprise error, therefore from detection position X (t 0) to detecting position X (t 0+ T 1) amount of movement X (t 0+ T 1)-X (t 0) become following (21) formula with the relation of desirable amount of movement (real amount of movement) n*p.
X(t 0+T 1)-X(t 0)≈n*p (21)
Therefore, if amount of movement X is (t 0+ T 1)-X (t 0) close to desirable amount of movement n*p, then from detection position X (t 0) to detecting position X (t 0+ T 1) till interval, i.e. above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p), can be judged as that moving body 21 (slide rule 12) moves with certain speed S.
T 0, T 1equal time can be undertaken measuring (also can measure means by other times to measure) by the counting of the clock arranged at the detection control portion 18A of detection control apparatus 18.
Therefore, the detection position X (t corresponding to position, top of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) 0), achieve this detection position X (t 0) time time t 0, from this time t 0elapsed time (traveling time) T risen 1, time t 0+ T 1detection position X (t 0+ T 1) can know in detection control portion 18A.And coil-span p and coil-span number n is known value.
Therefore, in this case, if threshold value to be set to ± L, then when meeting the condition of following (22) formula, can be judged as that moving body 21 (slide rule 12) moves with certain speed S in above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p).In addition, about X (t 0+ T 1)-X (t 0) with the relation of n*p ± L, in Fig. 3 (a), also have illustration.
n*p-L≥X(t 0+T 1)-X(t 0)≥n*p+L (22)
(b) the 2nd certain speed determination methods
In addition, in the above cases, also by following method, can judge that moving body 21 (slide rule 12) has carried out this situation mobile with certain speed S.
Moving body 21 (slide rule 12) moves T with certain speed S 1amount of movement (the S*T during time 1) with the n of coil-span p doubly (n*p) equal (n*p=S*T 1).Therefore, from detection position X (t 0) to detecting position X (t 0+ T 1) amount of movement X (t 0+ T 1)-X (t 0) and desirable amount of movement S*T 1relation become following (23) formula.
X(t 0+T 1)-X(t 0)≈S*T 1(23)
Therefore, if amount of movement X is (t 0+ T 1)-X (t 0) close to desirable amount of movement S*T 1, then can be judged as moving body 21 (slide rule 12) from detection position X (t 0) to detecting position X (t 0+ T 1) till interval, i.e. above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) in move with certain speed S.
As previously described, the detection position X (t corresponding to position, top of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) 0), achieve this detection position X (t 0) time time t 0, from this time t 0elapsed time (traveling time) T risen 1, time t 0+ T 1detection position X (t 0+ T 1) can know in detection control portion 18A.And, certain speed S and traveling time T 1it is known value.
Therefore, in this case, if threshold value to be set to ± L, then when meeting the condition of following (24) formula, can be judged as that moving body 21 (slide rule 12) moves with certain speed S in above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p).
S*T 1-L≥X(t 0+T 1)-X(t 0)≥S*T 1+L (24)
(c) the 3rd certain speed determination methods
In addition, also by following method, can judge that moving body 21 (slide rule 12) has carried out this situation mobile with certain speed S.
By time t 0detection position X (t) be set to X (t 0).
By time t 0+ T 1detection position X (t) be set to X (t 0+ T 2).
To be judged as that moving body 21 (slide rule 12) needs the traveling time of movement in the predetermined moving section of n times (n is natural number) of coil-span p to be set to T 2.In addition, at this, as induction position detector 11, show the example (Fig. 1) of line style rule, therefore amount of movement is displacement (becoming the anglec of rotation when rotary-type rule).
In this case traveling time T 2with aforesaid certain traveling time T 1difference, is be judged as that moving body 21 (slide rule 12) needs the time of movement in above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p), corresponds to and detect position X (t 0), X (t 0+ T 2) the mistake extent that comprises and changing.
Coil-span p is such as 2mm (being such as 2 degree at rotary-type rule) when line style rule.
Coil-span number n is set to such as 256 spacing.
Above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) is set as the interval of the 356th (coil-span number n is the situation of 256) coil-span p such as from the 101st coil-span p of rule coil 16 to rule coil 16.
At detection position X (t 0), X (t 0+ T 2) comprise error, therefore from detection position X (t 0) to detecting position X (t 0+ T 2) amount of movement X (t 0+ T 2)-X (t 0) such with the relation of desirable amount of movement n*p (25) formula described as follows.
X(t 0+T 2)-X(t 0)≈n*p (25)
In addition, if detect position X (t 0), X (t 0+ T 2) do not comprise error, then traveling time T 2with certain traveling time T 1identical, if therefore moving body 21 (slide rule 12) from detection position X (t 0) to detecting position X (t 0+ T 2) interval in move with certain speed S, then S*T 2equal with n*p.
But, in fact detect position X (t 0), X (t 0+ T 2) comprise error, traveling time T now 2not with certain traveling time T 1identical, therefore amount of movement S*T 2also following (26) formula is become with the relation of desirable amount of movement n*p.
S*T 2≈n*p (26)
Further, in this case, traveling time T 2correspond to and detect position X (t 0), X (t 0+ T 2) the mistake extent that comprises and changing, therefore the judgement of certain speed can the unfavorable relation by above-mentioned (25) formula and utilize the relation of above-mentioned (26) formula.
That is, if S*T 2close to n*p, then can be judged as moving body 21 (slide rule 12) from detection position X (t 0) to detecting position X (t 0+ T 2) interval, i.e. above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) in move with certain speed S.
T 0, T 2equal time can be undertaken measuring (also can measure means by other times to measure) by the counting of the clock arranged at the detection control portion 18A of detection control apparatus 18.
Therefore, from the detection position X (t corresponding to the position, top obtaining above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) 0) play the detection position X (t corresponding to terminal position obtaining above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) 0+ T 2) till elapsed time (traveling time), be namely judged as that moving body 21 (slide rule 12) needs the traveling time T of movement in above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) 2can know in detection control portion 18A.And certain speed S, coil-span p, coil-span number n are known value.
Therefore, if threshold value is ± L, then when meeting the condition of following (27) formula, can be judged as that moving body 21 (slide rule 12) moves with certain speed S in above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p).
n*p-L≥S*T 2≥n*p+L (27)
(3) correction data obtains process
Then, judge process (the 1st certain speed determination methods or the 2nd certain speed determination methods or the 3rd certain speed determination methods) by certain speed, use be judged as moving body 21 (slide rule 12) with obtain in the above-mentioned predetermined moving section of certain speed S movement (being equivalent to the interval of n times of coil-span p) from X (t 0) to X (t 0+ T) detection position data, obtain correction data E (m).
At this, illustrate and detect position X (t 0) be the detection position corresponding to position, top of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) and the position, top of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) is the situation of the position, top of the coil-span p of initial (the 1st) being equivalent to this moving section, be namely used in globality the detection position data that obtains in above-mentioned predetermined moving section (being equivalent to the interval of n times of coil-span p) and obtain the situation of correction data E (m).
Time during detection position corresponding to the position, top of the coil-span p of initial (the 1st) that achieve in above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) is set to t 0.
Time during detection position corresponding to the terminal position of the coil-span p of last (the n-th: such as the 256th) that achieve in above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) is set to t 0+ T.
That is, time T judges at certain speed the traveling time T that describes in process (the 1st certain speed determination methods or the 2nd certain speed determination methods or the 3rd certain speed determination methods) 1or T 2.
By the detection position X (t corresponding to the position, top of the coil-span p of initial (the 1st) of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) 0) be set to Reference detection positions.
This Reference detection positions X (t will be obtained 0) rise elapsed time t (m) be set to t (m)=0 ~ T.
M is index number (0 and positive integer).Such as, when index number m is 0, t (0)=0.If the maximal value of index number m is set to m m, then t (m m)=T.
The each coil-span position of position, top to the terminal position of the coil-span p of last (n-th) of the coil-span p from initial (the 1st) of the above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) of the detection position data that index number m uses corresponding to the calculating achieving correction data E (m).That is, m=0 corresponds to the position, top of the coil-span p of initial (the 1st), m=m mcorrespond to the terminal position of the coil-span p of last (n-th), between m=1,2,3 ..., m m-1 corresponds to each coil-span position the terminal position from the position, top of the coil-span p of initial (the 1st) to the coil-span p of last (n-th).
Further, set up index number m and time t (m) or detect position X (t 0+ t (m)) corresponding relation.
Such as, when index number m and time t (m) are set up corresponding relation, as long as Δ t is fixed and makes t (m)=m* Δ t, by index number m with detect position X (t 0+ t (m)) when setting up corresponding relation, as long as Δ x is fixed and makes X (t 0+ t (m))=X (t 0)+m* Δ x.
Detection position X (t when moving body 21 (slide rule 12) moves with certain speed S 0+ t (m)) corresponding to ideal position Xi (t 0+ t (m)) can (28) formula represent like that described as follows.
Xi(t 0+t(m))≈X(t 0)+S*t(m) (28)
That is, be judged as with the detection position X (t at the initial stage in the above-mentioned predetermined moving section of certain speed S movement (being equivalent to the n interval doubly of coil-span p) 0) (the detection position corresponding to position, top of the coil-span p of initial (the 1st)) be benchmark, to this Reference detection positions X (t 0) add the value that the multiplied value S*t (m) of certain speed S and time t (m) obtains and X (t 0)+S*t (m) is close to ideal position Xi (t 0+ t (m)) value.Will close to this ideal position Xi (t 0+ t (m)) position X (t 0)+S*t (m) is called approximate ideal position.
Correction data under index number m is set to E (m).
If (29) formula described as follows is like that from ideal position Xi (t 0+ t (m)) deduct and detect position X (t 0+ t (m)), then can obtain desirable correction data E (m).But, cannot know and detection position X (t 0+ t (m)) corresponding ideal position Xi (t 0+ t (m)).
E(m)＝Xi(t 0+t(m))-X(t 0+t(m)) (29)
On the other hand, about close to ideal position Xi (t 0+ t (m)) approximate ideal position X (t 0)+S*t (m), X (t 0) be detecting the detection position data obtained in the obtaining portion reason of position, certain speed S and time t (m) they are known values, therefore, it is possible to calculate based on them.
Therefore, if replace ideal position Xi (t 0+ t (m)) and use approximate ideal position X (t 0)+S*t (m), based on following (30) formula, from approximate ideal position X (t 0)+S*t (m) deduct detect position X (t 0+ t (m)), then can obtain close to desirable correction data E (m).
E(m)＝X(t 0)+S*t(m)-X(t 0+t(m)) (30)
Therefore, X (t is obtained corresponding to index number m 0)+S*t (m) and X (t 0+ t (m)), use these X (t 0)+S*t (m) and X (t 0+ t (m)), calculate correction data E (m) by above-mentioned (30) formula.
Now, X (t is obtained as corresponding to index number m 0)+S*t (m) and X (t 0+ t (m)) method, there is aforementioned being fixed by Δ t like that and index number m and time t (m) are set up corresponding relation method, Δ x to be fixed and by index number m and detection position X (t 0+ t (m)) set up the method for corresponding relation.
In the table of Fig. 4 (a), illustrate by Δ t being fixed and index number m and time t (m) being set up the method for corresponding relation, obtain X (t corresponding to index number m 0)+S*t (m) and X (t 0+ t (m)) time example.
In the table of Fig. 4 (a), when m=0,
T (m)=m* Δ t is t (0)=0,
X (t 0+ t (m)) be X (t 0+ t (0))=X (t 0),
X (t 0)+S*t (m) is X (t 0)+S*t (0)=X (t 0).
Therefore, E (m), according to (30) formula, becomes E (0)=X (t 0)-X (t 0)=0.
In the table of Fig. 4 (a), when m=1,
T (m)=m* Δ t is t (1)=Δ t,
X (t 0+ t (m)) be X (t 0+ t (1))=X (t 0+ Δ t),
X (t 0)+S*t (m) is X (t 0)+S*t (1)=X (t 0)+S* Δ t.
Therefore, E (m), according to (30) formula, becomes E (1)=X (t 0)+S* Δ t-X (t 0+ Δ t).
In the table of Fig. 4 (a), when m=2,
T (m)=m* Δ t is t (2)=2* Δ t,
X (t 0+ t (m)) be X (t 0+ t (2))=X (t 0+ 2* Δ t),
X (t 0)+S*t (m) is X (t 0)+S*t (2)=X (t 0)+S*2* Δ t.
Therefore, E (m), according to (30) formula, becomes E (m)=X (t 0)+S*2* Δ t-X (t 0+ 2* Δ t).
In the table of Fig. 4 (a), when m=3,
T (m)=m* Δ t is t (3)=3* Δ t,
X (t 0+ t (m)) be X (t 0+ t (3))=X (t 0+ 3* Δ t),
X (t 0)+S*t (m) is X (t 0)+S*t (3)=X (t 0)+S*3* Δ t.
Therefore, E (m), according to (30) formula, becomes E (m)=X (t 0)+S*3* Δ t-X (t 0+ 3* Δ t).
Below, although in the table of Fig. 4 (a) omit record, m=4,5 ..., m msituation too,
In the table of Fig. 4 (a), at m=m mwhen,
T (m)=m* Δ t is t (m m)=m m* Δ t=T,
X (t 0+ t (m)) be X (t 0+ t (m m))=X (t 0+ T),
X (t 0)+S*t (m) is X (t 0)+S*t (m m)=X (t 0)+S*T.
Therefore, E (m), according to (30) formula, becomes E (m)=X (t 0)+S*T-X (t 0+ T).
In addition, t (m)=0, Δ t, 2* Δ t, 3* Δ t ..., T obtained by m* Δ t.That is, detection position X (t will be achieved 0) time time t 0be set to reference time (0), obtain as from this reference time (0) often through the Δ t time time Δ t, 2* Δ t, 3* Δ t ..., T.
X (t 0+ t (m))=X (t 0), X (t 0+ Δ t), X (t 0+ 2* Δ t), X (t 0+ 3* Δ t) ..., X (t 0+ T) as at time t 0the detection position X (t obtained 0) and afterwards often through the detection position X (t of Δ t time 0+ Δ t), X (t 0+ 2* Δ t), X (t 0+ 3* Δ t) ..., X (t 0+ T) and be obtained.
In the table of Fig. 4 (b), illustrate by Δ x is fixed and by index number m with detect position X (t 0+ t (m)) set up the method for corresponding relation, X (t is obtained corresponding to index number m 0)+S*t (m) and X (t 0+ t (m)) the example of situation.
In the table of Fig. 4 (b), when m=0,
T (m) is t (0)=0,
X (t 0+ t (m))=X (t 0)+m* Δ x is X (t 0+ t (0))=X (t 0),
X (t 0)+S*t (m) is X (t 0)+S*t (0)=X (t 0).
Therefore, E (m), according to (30) formula, becomes E (0)=X (t 0)-X (t 0)=0.
In the table of Fig. 4 (b), when m=1,
T (m) is t (1),
X (t 0+ t (m))=X (t 0)+m* Δ x is X (t 0+ t (1))=X (t 0)+Δ x,
X (t 0)+S*t (m) is X (t 0)+S*t (1).
Therefore, E (m), according to (30) formula, becomes E (1)=X (t 0)+S*t (1)-X (t 0)+Δ x.
In the table of Fig. 4 (b), when m=2,
T (m) is t (2),
X (t 0+ t (m))=X (t 0)+m* Δ x is X (t 0+ t (2))=X (t 0)+2* Δ x,
X (t 0)+S*t (m) is X (t 0)+S*t (2).
Therefore, E (m), according to (30) formula, becomes E (2)=X (t 0)+S*t (2)-X (t 0)+2* Δ x.
In the table of Fig. 4 (b), when m=3,
T (m) is t (3),
X (t 0+ t (m))=X (t 0)+m* Δ x is X (t 0+ t (3))=X (t 0)+3* Δ x,
X (t 0)+S*t (m) is X (t 0)+S*t (3).
Therefore, E (m), according to (30) formula, becomes E (3)=X (t 0)+S*t (3)-X (t 0)+3* Δ x.
Below, although in the table of Fig. 4 (b) omit record, m=4,5 ..., m msituation too,
In the table of Fig. 4 (b), at m=m mwhen,
t(m)＝t(m m)＝T，
X (t 0+ t (m))=X (t 0)+m* Δ x is X (t 0+ t (m m))=X (t 0+ T)=X (t 0)+m m* Δ x,
X (t 0)+S*t (m) is X (t 0)+S*t (m m)=X (t 0)+S*T.
Therefore, E (m), according to (30) formula, becomes E (m)=X (t 0)+S*T-X (t 0)+m m* Δ x.
In addition, X (t 0+ t (m))=X (t 0)+m* Δ x=X (t 0), X (t 0)+Δ x, X (t 0)+2* Δ x, X (t 0)+3* Δ x ..., X (t 0)+m m* Δ x is as at time t 0the detection position X (t obtained 0), the detection position X (t of every amount of movement Δ x afterwards 0)+Δ x, X (t 0)+2* Δ x, X (t 0)+3* Δ x ..., X (t 0)+m m* Δ x and obtaining.
t(m)＝t(0)(＝0)、t(1)、t(2)、t(3)、…、
T detects position X (t as achieving 0) time time t 0obtain after being set to t reference time (0) (=0) and detect position X (t 0)+Δ x, X (t 0)+2* Δ x, X (t 0)+3* Δ x ..., X (t 0)+m mtime t (1), t (2) during the detection position of * Δ x, t (3) ..., T and obtaining.
In addition, about corresponding relation that is above-mentioned and index number m, also illustrate in Fig. 3 (a).
Correction data E (m)=E (0) (=0), the E (1) that calculate based on above-mentioned (30) formula, E (2), E (3) ..., E (m m) according to index number m:0,1,2,3 ..., m morder, i.e. E (0) (=0), E (1), E (2), E (3) ..., E (m m) order store successively address from the outset to each address of read-only storage 18B.If so the beginning address of correction data E (m) from read-only storage 18B is stored successively, then do not need to store index number m.
In this case, the position, top replacing the coil-span p from initial (the 1st) of the above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) of the detection position data that the address of index number m, read-only storage 18B uses corresponding to the calculating achieving correction data E (m) is to each coil-span position of the last terminal position of the coil-span p of (n-th).
That is, the position, top that address corresponds to the coil-span p of initial (the 1st) is started, m m+ 1 address corresponds to the terminal position of the coil-span p of last (n-th), from the 2nd to m mindividual address is corresponding in turn to each coil-span position the terminal position in the position, top of the coil-span p from initial (the 1st) to the coil-span p of last (n-th).
In addition, may not be defined in this, also correction data E (m) can be stored at random the address of read-only storage 18B.In this case, index number m is also stored in read-only storage 18B, as long as this index number m and correction data E (m) are set up corresponding relation.Such as, can be in the 5th address, store index number 2 and correction data E (2), in the 2nd address, store the method for index number 3 and correction data E (3).
Such as the number of correction data E (m) of every 1 coil-span p is 512, and when coil-span number n is 256, the number being stored in correction data E (m) of read-only storage 18B is all 131072.
In addition, the above-mentioned above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) detecting position data that obtains is set to 1, but be not defined in this, obtaining the above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) detecting position data can for multiple.
In this case, by above-mentioned same method, detection position data is obtained at multiple moving section (being equivalent to the n interval doubly of coil-span p), obtain correction data E (m) of each moving section (being equivalent to the n interval doubly of coil-span p) based on above-mentioned detection position data, the mean value of correction data E (m) of above-mentioned each moving section (being equivalent to the n interval doubly of coil-span p) is set to final correction data E (m).
Further, this final (mean value) correction data E (m) is stored in read-only storage 18B.In this case, about method correction data E (m) being stored in read-only storage 18B, as mentioned before.
(4) correction of position is detected
Then, in detection control apparatus 18 (detection control portion 18A), when carrying out actual operation (processing of such as lathe) making moving body 21 (slide rule 12) mobile etc., when carrying out the correction detecting position X (t), read correction data E (m) from read-only storage 18B.
Further, based on following (31) formula, to detection position X (t 0+ t (m)) add that the correction data read from read-only storage 18B obtains E (m), obtain X ' (t thus 0+ t (m)), as to this X ' (t 0+ t (m)) the detection position that corrects and exporting.
X’(t 0+t(m))＝X(t 0+t(m))+E(m) (31)
Specifically, the shift position of moving body 21 (slide rule 12) is corresponding with the position (coil-span position) of the rule coil 16 of rule 15, and therefore the coil-span position of rule coil 16 is corresponding with detection position X (t).
Therefore, in detection control apparatus 18 (detection control portion 18A), when obtaining certain detection position X (t) in the position detecting moving body 21 (slide rule 12), this detection position X (t) known is the detection position corresponding with which coil-span position.
Therefore, in detection control apparatus 18 (detection control portion 18B), when obtaining certain detection position X (t) in the position detecting moving body 21 (slide rule 12), judge the coil-span position corresponding with this detection position X (t), correction data E (m) corresponding with this coil-span position is read from read-only storage 18B, this detection position X (t) is added with this correction data E (m), obtains the detection position after correcting thus.
In addition, when the position between certain coil-span position detected corresponding to position X (t) is coil-span position corresponding to the coil-span position corresponding to the 1st correction data E (m) and the 2nd correction data E (m) then (when the coil-span position such as corresponding to correction data E (10) and the position between the coil-span position corresponding to correction data E (11)), 1st correction data E (m) (such as correction data E (10)) and the 2nd correction data E (m) (such as correction data E (11)) are carried out to interpolation interpolation and obtain correction data, the correction data of this interpolation interpolation gained is added with this detection position X (t), obtain the detection position after correcting thus.
In addition, obtain process by correction data and each coil-span p in n the coil-span p of correction data E (m) the corresponding rule coil 16 of n coil-span p amount that obtain and Reusability, thus correct detecting position X (t).
In addition, in principle, coil-span n can be 1.That is, as long as correction data E (m) obtains at least 1 coil-span p and measures.In this case, each coil-span p Reusability of correction data E (m) the corresponding rule coil 16 of 1 coil-span p amount, thus detection position X (t) is corrected.
In addition, in above-mentioned, judge in process (the 1st certain speed determination methods or the 2nd certain speed determination methods or the 3rd certain speed determination methods) at certain speed, globality ground uses and is judged as moving body 21 with the detection position data of the above-mentioned predetermined moving section of certain speed S movement (being equivalent to the n interval doubly of coil-span p) to obtain correction data E (m), but be not defined in this, the part in the data of this detection position X (t) also can be used to obtain correction data E (m).
That is, the arbitrary N from above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) is used 1the detection position X (t corresponding to position, top of individual (such as the 50th) coil-span p n1) data to the arbitrary N of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) 2the detection position X (t corresponding to terminal position of individual (such as the 150th) coil-span p n2) data, obtain correction data E (m).
In this case, if from obtaining N 1the detection position X (t corresponding to position, top of individual (such as the 50th) coil-span p n1) time plays and obtain N 2the detection position X (t corresponding to terminal position of individual (such as the 150th) coil-span p n2) time till traveling time be T 3as long as the T then in aforesaid time t (m)=0 ~ T is set to T 3.And, detect position X (t n1) become the detection position X (t of benchmark 0), detect position X (t n2) become X (t 0+ t (m m)).
Further, in this case, also correction data E (m) can be obtained by method similar to the above.
In addition, judge in process (the 1st certain speed determination methods or the 2nd certain speed determination methods or the 3rd certain speed determination methods) at certain speed, even if when be judged as moving body 21 with the above-mentioned predetermined moving section of certain speed S movement (being equivalent to the n interval doubly of coil-span p) from the half-way of the coil-span p of initial (the 1st) to the half-way of the last coil-span p of (such as the 256th), also can obtain correction data E (m) by method similar to the above.
That is, as long as use the arbitrary N except the coil-span p of initial (the 1st) in above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) 3the detection position X (t corresponding to position, top of individual (such as the 2nd) coil-span p n3) data to the arbitrary N except the coil-span p of last (such as the 256th) of above-mentioned predetermined moving section (being equivalent to the n interval doubly of coil-span p) 4the detection position X (t corresponding to terminal position of individual (such as the 255th) coil-span p n4) data obtain correction data E (m).
In this case, if from obtaining N 3the detection position X (t corresponding to position, top of individual (such as the 2nd) coil-span p n3) time to obtaining N 4the detection position X (t corresponding to terminal position of individual (such as the 255th) coil-span p n4) time traveling time be T 4as long as then the T in aforesaid time t (m)=0 ~ T is set to T 4.And, detect position X (t n3) become the detection position X (t of benchmark 0), detect position X (t n4) become X (t 0+ t (m m)).
Further, in this case, also correction data E (m) can be obtained by method similar to the above.
Or, in this case, also after the detection position data from half-way to terminal position of the coil-span p by initial (the 1st) joins finally the detection position data of the half-way of the coil-span p of (such as the 256th), correction data E (m) can be obtained.In this case, correction data E (m) corresponding to terminal position from the position, top of the 2nd coil-span p to the coil-span p of last (such as the 256th) can be obtained.
As previously discussed, in the detection method for correcting position of the induction position detector 11 of present embodiment example 1, induction position detector 11 has slide rule 12 and rule 15, slide rule 12 possesses the 1st slide rule coil 13 and the 2nd slide rule coil 14, rule 15 possesses rule coil 16, slide rule 12 is installed on moving body 21 and moves together with moving body 21, 1st slide rule coil 13 and the 2nd slide rule coil 14 and rule coil 16 are to be parallel to each other and mode in opposite directions configures, the feature of the detection method for correcting position of induction position detector 11 is, carry out following process: detect position obtaining portion reason, according to the speed value of certain speed S, moving body 21 is moved, induction position detector 11 is utilized to detect the position of moving body 21 and obtain detection position X (t), certain speed judges process, based on the coil-span p (the 1st certain speed determination methods) detecting position X (t), rule coil 16, or based on detecting the traveling time T of position X (t), certain speed S, moving body 21 1(the 2nd certain speed determination methods), or based on coil-span p, the certain speed S of rule coil 16, the traveling time T of moving body 21 2(the 3rd certain speed determination methods), judges that moving body 21 has carried out this situation mobile with certain speed S in predetermined moving section, and correction data obtains process, by the detection position X (t corresponding to the position, top of the arbitrary coil-span p in above-mentioned moving section 0) be set to Reference detection positions, to Reference detection positions X (t 0) add from obtaining said reference and detect position X (t 0) multiplied value of elapsed time T and certain speed S that rises, obtain approximate ideal position thus, obtain correction data based on this approximate ideal position and detection position.
Therefore, do not need the high precision position detecting device different from induction position detector 11, utilize induction position detector 11 self can obtain correction data and carry out detecting the correction of position.
In addition, the feature of the detection method for correcting position of the induction position detector 11 of present embodiment example 1 is, judge in process (the 1st certain speed determination methods) at above-mentioned certain speed, the interval of the n being equivalent to coil-span p if be set to by above-mentioned moving section times (n is natural number), the traveling time needed for moving body 21 is mobile in above-mentioned moving section with certain speed S is set to T 1, the detecting position corresponding to the position, top of above-mentioned moving section is installed as X (t 0), the detecting position corresponding to the terminal position of above-mentioned moving section is installed as X (t 0+ T 1), threshold value is set to ± L, is then meeting n*p-L>=X (t 0+ T 1)-X (t 0during the condition of)>=n*p+L, be judged as that moving body moves with certain speed S in above-mentioned moving section.
Therefore, can easily and reliably carry out the judgement of the certain speed S of moving body 21 by induction position detector 11 self.
In addition, the feature of the detection method for correcting position of the induction position detector 11 of present embodiment example 1 is, judge in process (the 2nd certain speed determination methods) at above-mentioned certain speed, the interval of the n being equivalent to coil-span p if be set to by above-mentioned moving section times (n is natural number), the traveling time needed for moving body 21 is mobile in above-mentioned moving section with certain speed S is set to T 1, the detecting position corresponding to the position, top of above-mentioned moving section is installed as X (t 0), the detecting position corresponding to the terminal position of above-mentioned moving section is installed as X (t 0+ T 1), threshold value is set to ± L, is then meeting S*T 1-L>=X (t 0+ T 1)-X (t 0)>=S*T 1during the condition of+L, be judged as that moving body 21 moves with certain speed S in above-mentioned moving section.
Therefore, can easily and reliably carry out the judgement of the certain speed S of moving body 21 by induction position detector 11 self.
In addition, the detection method for correcting position of the induction position detector 11 of example 1 according to the present embodiment, it is characterized in that, judge in process (the 3rd certain speed determination methods) at above-mentioned certain speed, the interval of the n being equivalent to coil-span p if be set to by above-mentioned moving section times (n is natural number), will be judged as that moving body 21 needs the traveling time of movement in above-mentioned moving section to be set to T 2, threshold value is set to ± L, is then meeting n*p-L>=S*T 2during the condition of>=n*p+L, be judged as that moving body 21 moves with certain speed S in above-mentioned moving section.
Therefore, can easily and reliably carry out the judgement of the certain speed S of moving body 21 by induction position detector 11 self.
In addition, the detection method for correcting position of the induction position detector 11 of example 1 according to the present embodiment, it is characterized in that, obtain in process at above-mentioned correction data, if time during detection position corresponding to the position, top of the arbitrary coil-span p achieved in above-mentioned moving section is set to t 0, time during detection position corresponding to the terminal position of another the coil-span p achieved in above-mentioned moving section is set to t 0+ T, installs the detecting position corresponding to the position, top of the arbitrary coil-span p in above-mentioned moving section as Reference detection positions X (t 0), position X (t will be detected from obtaining said reference 0) rise elapsed time t (m) (m is index number) be set to t (m)=0 ~ T, Δ t fixed and sets up the corresponding relation of index number m and t (m), or Δ x fixed and sets up index number m and X (t 0+ t (m)) corresponding relation, by E (m)=X (t 0)+S*t (m)-X (t 0+ t (m)) formula calculate correction data E (m) corresponding to index number m.
Therefore, can easily and reliably obtain correction data E (m) by induction position detector 11 self.
In addition, the detection method for correcting position of the induction position detector 11 of example 1, is characterized in that according to the present embodiment, is set to multiple by above-mentioned moving section, obtain correction data at this multiple moving section, the mean value of this multiple correction data is set to final correction data.
Therefore, it is possible to obtain more high-precision correction data.
< embodiment example 2>
Based on Fig. 5, the detection method for correcting position of the induction position detector of embodiments of the present invention example 2 is described.
Present embodiment example 2 about its system architecture, obtain correction data E (m) till process (detect position obtaining portion reason, certain speed judges process, correction data obtain process), identical with above-mentioned embodiment example 1 (Fig. 1 ~ Fig. 4), but correction data E (m) is different from above-mentioned embodiment example 1 to the storage of read-only storage 18B.
Fig. 5 represents the example of correction data E (m) obtained by the method identical with above-mentioned embodiment example 1.In Figure 5, transverse axis is index number m, and the longitudinal axis is correction data E (m).
Also, as previously described, be contained in the error E detecting position X (t) and correspond to the coil-span cycle of rule coil 16 and periodically change (Fig. 3 (b)).
Therefore, as shown in Figure 5, correction data E (m) also corresponds to the coil-span cycle of rule coil 16 and periodically changes.In addition, this situation is periodically changed in order to express corresponding to the coil-span cycle, same with the situation of Fig. 3 (b), in Figure 5, correction data E (m) is represented with sine wave, but same with the situation of the error E of reality, actual correction data E (m) also becomes the waveform be slightly out of shape.
And, when present embodiment example 2, in detection control apparatus 18 (detection control portion 18A), after achieving correction data E (m), as above-mentioned embodiment example 1, correction data E (m) is all stored in read-only storage 18B, detection position timing is being carried out to this correction data E (m), is not reading from read-only storage 18B, carry out following process.
First, to Fig. 5 illustrate such correction data E (m)=E (1), E (2), E (3) ..., E (m m) carry out Fourier transform.
And, according to the result of this Fourier transform, in selection number j amount (i=0 ~ j-1) the large component F (i) of spectrum (F (0), F (1), F (2) ..., F (j-1)), and they are stored in read-only storage 18B (j is natural number).In addition, the data stored as component F (i) are amplitude, frequency, phase place.
Then, when carrying out actual operation (the processing operation etc. of such as lathe) making moving body 21 (slide rule 12) mobile etc., when carrying out the correction detecting position X (t), from read-only storage 18B read component F (i)=F (0), F (1), F (2) ..., F (j-1), carry out the inverse Fourier transform of this component F (i), obtain thus correction data E ' (m)=E ' (0), E ' (1), E ' (2), E ' (3) ..., E ' (m m).
Further, same with the situation of above-mentioned embodiment example 1, based on following (32) formula, by detection position X (t 0+ t (m)) add that correction data obtains E ' (m) to obtain X ' (t 0+ t (m)), and by this X ' (t 0+ t (m)) export as the detection position after correction.In addition, about the details corrected, same with the situation of above-mentioned embodiment example 1.
X’(t 0+t(m))＝X(t 0+t(m))+E’(m) (32)
As described above, the feature of the detection method for correcting position of the induction position detector 11 of present embodiment example 2 is, Fourier transform is carried out to correction data E (m), component F (i) large for the spectrum of upper several j amount (i=0 ~ j-1) is stored in read-only storage 18B, read component F (i) from read-only storage 18B, carry out inverse Fourier transform and obtain correction data E ' (m).
Therefore, it is possible to reduce the capacity of read-only storage 18B.
In addition, in above-mentioned, be the situation of line style rule although the description of induction position detector, but be not defined in this, as previously described, the situation being rotary-type rule about induction position detector also can be suitable for method of the present invention.
Rotary-type rule has stator (primary side parts) and rotor (secondary side parts), this stator (primary side parts) possesses stator coil (first siding ring), this rotor (secondary side parts) possesses rotor winding (second siding ring), rotor is installed on moving body (rotary body) and moves (rotation) together with moving body (rotary body), and stator coil and rotor winding are to be parallel to each other and mode in opposite directions configures.
For so rotary-type rule, also can be suitable for method of the present invention and obtain correction data, being corrected the detection position (anglec of rotation) of rotary-type rule by this correction data.
Industrial applicibility
The present invention relates to the detection method for correcting position of induction position detector, also can be suitable for when not using the high precision position detecting device different from induction position detector, when self obtaining correction data to carry out the correction detecting position by induction position detector.
Description of reference numerals
11 induction position detectors
12 slide rules
13 the 1st slide rule coils
14 the 2nd slide rule coils
15 rules
16 rule coils
17 test sections
18 detection control apparatuss
18A detection control portion
18B read-only storage
20 driving control devices
21 moving bodys

Claims (7)

1. the detection method for correcting position of an induction position detector, described induction position detector has primary side parts and secondary side parts, described primary side parts possess first siding ring, described secondary side parts possess second siding ring, described primary side parts or described secondary side parts are installed on moving body and move together with described moving body, described first siding ring and described second siding ring are to be parallel to each other and mode in opposite directions configures
The feature of the detection method for correcting position of described induction position detector is, carries out following process:
Detect position obtaining portion reason, according to the speed value of certain speed, described moving body is moved, utilize described induction position detector detect the position of described moving body and obtain and detect position;
Certain speed judges process, based on the coil-span of described detection position and described second siding ring, or based on the traveling time of described detection position, described certain speed and described moving body, or based on the traveling time of the coil-span of described second siding ring, described certain speed and described moving body, judge that described moving body has carried out this situation mobile at predetermined moving section with described certain speed; And
Correction data obtains process, detecting position corresponding to the position, top of the arbitrary coil-span in described moving section is installed as Reference detection positions, the multiplied value obtaining elapsed time after described Reference detection positions and described certain speed is added to described Reference detection positions, obtain approximate ideal position thus, obtain correction data based on described approximate ideal position and detection position.
2. the detection method for correcting position of induction position detector according to claim 1, is characterized in that,
Judge in process at described certain speed,
Described moving section is set to the n interval being doubly equivalent to described coil-span p, n is natural number,
Traveling time needed for described moving body is mobile in described moving section with described certain speed S is set to T 1,
Detecting position corresponding to the position, top of described moving section is installed as X (t 0), the detecting position corresponding to the terminal position of described moving section is installed as X (t 0+ T 1),
Threshold value is set to ± L,
Then meeting n*p-L>=X (t 0+ T 1)-X (t 0during the condition of)>=n*p+L, be judged as that described moving body moves with described certain speed S in described moving section.
3. the detection method for correcting position of induction position detector according to claim 1, is characterized in that,
Judge in process at described certain speed,
Described moving section is set to the n interval being doubly equivalent to described coil-span p, n is natural number,
Traveling time needed for described moving body is mobile in described moving section with described certain speed S is set to T 1,
Detecting position corresponding to the position, top of described moving section is installed as X (t 0), the detecting position corresponding to the terminal position of described moving section is installed as X (t 0+ T 1),
Threshold value is set to ± L,
Then meeting S*T 1-L>=X (t 0+ T 1)-X (t 0)>=S*T 1during the condition of+L, be judged as that described moving body moves with described certain speed S in described moving section.
4. the detection method for correcting position of induction position detector according to claim 1, is characterized in that,
Judge in process at described certain speed,
Described moving section is set to the n interval being doubly equivalent to described coil-span p, n is natural number,
To be judged as that the traveling time of described moving body in described moving section required for movement is set to T 2,
Threshold value is set to ± L,
Then meeting n*p-L>=S*T 2during the condition of>=n*p+L, be judged as that described moving body moves with described certain speed S in described moving section.
5. the detection method for correcting position of induction position detector according to claim 1, is characterized in that,
Obtain in process at described correction data,
Time during detection position corresponding to the position, top of the arbitrary coil-span p achieved in described moving section is set to t 0,
Time during detection position corresponding to the terminal position of the another arbitrary coil-span p achieved in described moving section is set to t 0+ T,
Detecting position corresponding to the position, top of the arbitrary coil-span p in described moving section is installed as Reference detection positions X (t 0),
Described Reference detection positions X (t will be obtained 0) after to be set to t (m)=0 ~ T, m be index number elapsed time t (m),
Δ t fixed and sets up the corresponding relation of index number m and t (m), or Δ x fixed and sets up index number m and X (t 0+ t (m)) corresponding relation,
By E (m)=X (t 0)+S*t (m)-X (t 0+ t (m)) formula calculate correction data E (m) corresponding with index number m.
6. the detection method for correcting position of induction position detector according to claim 1, is characterized in that,
Described moving section is set to multiple, obtains correction data at this multiple moving section, the mean value of this multiple correction data is set to final correction data.
7. the detection method for correcting position of induction position detector according to claim 1, is characterized in that,
Fourier transform is carried out to described correction data, component F (i) large for the spectrum of upper several j amount is stored in storer, wherein i=0 ~ j-1,
Read component F (i) from described storer, carry out inverse Fourier transform and obtain correction data.
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