WO1998044487A3 - Method of manufacturing a magnetic head having a structure of layers - Google Patents

Method of manufacturing a magnetic head having a structure of layers Download PDF

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Publication number
WO1998044487A3
WO1998044487A3 PCT/IB1998/000272 IB9800272W WO9844487A3 WO 1998044487 A3 WO1998044487 A3 WO 1998044487A3 IB 9800272 W IB9800272 W IB 9800272W WO 9844487 A3 WO9844487 A3 WO 9844487A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
magnetically permeable
gap
magnetic
providing
Prior art date
Application number
PCT/IB1998/000272
Other languages
French (fr)
Other versions
WO1998044487A2 (en
Inventor
Kesteren Hans Willem Van
Original Assignee
Koninkl Philips Electronics Nv
Philips Norden Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv, Philips Norden Ab filed Critical Koninkl Philips Electronics Nv
Priority to EP98903254A priority Critical patent/EP0906615A2/en
Priority to JP10529296A priority patent/JP2000511679A/en
Publication of WO1998044487A2 publication Critical patent/WO1998044487A2/en
Publication of WO1998044487A3 publication Critical patent/WO1998044487A3/en

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3916—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
    • G11B5/3919—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
    • G11B5/3922—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure
    • G11B5/3925—Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure the two parts being thin films
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49044—Plural magnetic deposition layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material

Abstract

Method of manufacturing a magnetic head which is built up in layers. A first magnetically permeable layer (9) for forming a first flux guide, a non-magnetic gap layer (15) for forming a transducing gap and a second magnetically permeable layer (17) for forming a second flux guide are provided consecutively. To be able to form narrow gap widths in a reproducible manner, the method comprises the steps of: providing a non-magnetic basic layer; forming a hollow part in the basic layer by removing non-magnetic material, resulting in a hollowed basic layer (3a); providing the first magnetically permeable layer on the hollowed basic layer; providing a non-magnetic intermediate layer (11) on the first magnetically permeable layer; forming a plane surface by removing material, said surface comprising a part of the basic layer, a part of the first magnetically permeable layer and a part of the intermediate layer, in which the thickness of the first magnetically permeable layer at the area of said surface determines the gap width of the transducing gap of the magnetic head which is being formed; providing the non-magnetic gap layer on said surface, and providing the second magnetically permeable layer on said gap layer.
PCT/IB1998/000272 1997-04-01 1998-03-05 Method of manufacturing a magnetic head having a structure of layers WO1998044487A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP98903254A EP0906615A2 (en) 1997-04-01 1998-03-05 Method of manufacturing a magnetic head having a structure of layers
JP10529296A JP2000511679A (en) 1997-04-01 1998-03-05 Method of manufacturing magnetic head having layer structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP97200943.5 1997-04-01
EP97200943 1997-04-01

Publications (2)

Publication Number Publication Date
WO1998044487A2 WO1998044487A2 (en) 1998-10-08
WO1998044487A3 true WO1998044487A3 (en) 1999-01-21

Family

ID=8228157

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB1998/000272 WO1998044487A2 (en) 1997-04-01 1998-03-05 Method of manufacturing a magnetic head having a structure of layers

Country Status (5)

Country Link
US (1) US5890278A (en)
EP (1) EP0906615A2 (en)
JP (1) JP2000511679A (en)
CN (1) CN1226988A (en)
WO (1) WO1998044487A2 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2259902A1 (en) * 1996-07-10 1998-01-15 Lecroy Corporation Method and system for characterizing terminations in a local area network
US5831801A (en) * 1997-01-21 1998-11-03 Yamaha Corporation Thin film magnetic head with special pole configuration
FR2774797B1 (en) * 1998-02-11 2000-03-10 Commissariat Energie Atomique PROCESS FOR PRODUCING AN ASSEMBLY WITH MULTIPLE MAGNETIC HEADS AND MULTIPLE HEAD ASSEMBLY OBTAINED BY THIS PROCESS
US6521335B1 (en) * 1998-05-07 2003-02-18 Seagate Technology, Inc. Method of fabricating a submicron narrow writer pole
CN1143272C (en) * 1998-12-03 2004-03-24 皇家菲利浦电子有限公司 Method of forming an assembly of stacked layers
US7773340B2 (en) * 1999-02-23 2010-08-10 Advanced Research Corporation Patterned magnetic recording head having a gap pattern with substantially elliptical or substantially diamond-shaped termination pattern
US6269533B2 (en) * 1999-02-23 2001-08-07 Advanced Research Corporation Method of making a patterned magnetic recording head
US6496328B1 (en) * 1999-12-30 2002-12-17 Advanced Research Corporation Low inductance, ferrite sub-gap substrate structure for surface film magnetic recording heads
US7023658B1 (en) * 2000-02-08 2006-04-04 Western Digital (Fremont), Inc. Submicron track-width pole-tips for electromagnetic transducers
JP2003533041A (en) * 2000-05-11 2003-11-05 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Manufacturing method of magnetic element
US7079354B1 (en) 2000-08-14 2006-07-18 Hitachi Global Storage Technologies Netherlands, B.V. Planar magnetic head
US6958885B1 (en) 2000-12-21 2005-10-25 Western Digital (Fremont), Inc. Insulation layer structure for inductive write heads and method of fabrication
US7025659B2 (en) * 2002-01-14 2006-04-11 Hitachi Global Storage Technologies Netherlands B.V. Simultaneous planarization of pole piece and coil materials for write head applications
US7106544B2 (en) * 2003-05-09 2006-09-12 Advanced Research Corporation Servo systems, servo heads, servo patterns for data storage especially for reading, writing, and recording in magnetic recording tape
US8144424B2 (en) 2003-12-19 2012-03-27 Dugas Matthew P Timing-based servo verify head and magnetic media made therewith
US7283317B2 (en) * 2004-01-30 2007-10-16 Advanced Research Corporation Apparatuses and methods for pre-erasing during manufacture of magnetic tape
US20100321824A1 (en) * 2004-02-18 2010-12-23 Dugas Matthew P Magnetic recording head having secondary sub-gaps
US7450341B2 (en) * 2004-05-04 2008-11-11 Advanced Research Corporation Intergrated thin film subgap subpole structure for arbitrary gap pattern magnetic recording heads and method of making the same
WO2009094516A1 (en) * 2008-01-23 2009-07-30 Advanced Research Corporation Recording heads with embedded tape guides and magnetic media made by such recording heads
US8068301B2 (en) * 2008-03-28 2011-11-29 Advanced Research Corporation Magnetic media formed by a thin film planar arbitrary gap pattern magnetic head
WO2011014836A2 (en) * 2009-07-31 2011-02-03 Advanced Research Corporation Erase drive systems and methods of erasure for tape data cartridge

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5375023A (en) * 1992-12-29 1994-12-20 International Business Machines Corporation Submicron thin film inductive head with self-aligned staggered pole-tips
EP0670570A2 (en) * 1994-03-03 1995-09-06 Seagate Technology International Magnetoresistive head and method of manufacture thereof
US5566442A (en) * 1994-11-16 1996-10-22 Commissariat A L'energie Atomique Method of making a vertical magnetic head with an integrated coil

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0617410B1 (en) * 1993-03-22 1999-09-22 OnStream, Inc. Method of manufacturing a thin-film magnetic head, and magnetic head obtainable by means of said method
DE69419642T2 (en) * 1993-03-22 2000-02-17 Onstream Inc Manufacturing method of a thin film magnetic head and magnetic head produced thereafter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5375023A (en) * 1992-12-29 1994-12-20 International Business Machines Corporation Submicron thin film inductive head with self-aligned staggered pole-tips
EP0670570A2 (en) * 1994-03-03 1995-09-06 Seagate Technology International Magnetoresistive head and method of manufacture thereof
US5566442A (en) * 1994-11-16 1996-10-22 Commissariat A L'energie Atomique Method of making a vertical magnetic head with an integrated coil

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IBM TECHNICAL DISCLOSURE BULLETIN, Volume 36, No. 5, May 1993, "Compact Horizontal Head Structure for Arrays", pages 377-378. *

Also Published As

Publication number Publication date
JP2000511679A (en) 2000-09-05
US5890278A (en) 1999-04-06
EP0906615A2 (en) 1999-04-07
WO1998044487A2 (en) 1998-10-08
CN1226988A (en) 1999-08-25

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